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Microfabrication stations

PDMS chips Station

Produce PDMS chips without a clean room
Save Time

We provide and install all equipments in your lab.

Easy to Use

With our plug and play instruments and training you will produce microchips in one week.

Save Space

The equivalent of a conventional clean room in 3m2.

High resolution

Reach the same resolution as in a clean room.

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Benefits

  • Highly reproducible processes for your chip fabrication.
  • Include a fully automatic plasma cleaner for PDMS bonding.
  • A fast fabrication process and develop your chip in 24h.
  • Take advantage of our knowledge for your soft-lithography process equipment.

Included

Equipment:

  • Complete air plasma system
  • Oven for fast PDMS curing
  • Desiccator for PDMS degassing
  • To do PDMS membranes, a spin coater can be added.
Accessories:

All lab accessories (glass slides, Petri dishes, disposable cups, stirring rods, scalpels, etc.) are included. We give you all the products’ references and providers’ information to refill your stock.

Microfluidic accesory softlithobox
Chemicals:

All chemicals (SU8, Adherence promoter, SU8 developer, Isopropanol, Acetone, etc.) are included. We give you all the products’ references and providers’ information to refill your stock.

Chemicals microfluidic SU8 developer isopropanol aceton TMCS

Support

  • Standard support pack: We take care of the after-sales of all your instruments and provide you with a microfabrication process sheet and tutorials. Also, you have one year of phone assistance to answer all your microfabrication questions.
  • Extended support pack: In addition to the standard pack our R&D team installs the Softlithobox directly in your lab. This way, we adapt all our microfabrication processes on-site and fit your needs. We also train your team so they can fabricate your microfluidic chips straight away.

Quake valve

Pneumatic PDMS Quake valves

Solvent permeation

Solvent Permeation PDMS membrane

Cell culture

Cell coculture with PDMS membrane

 

 

Plasma cleaner

soft lithography Plasma-datasheet BLACK

The first plasma cleaner designed specifically for PDMS bonding. This automated plasma enables you to easily fabricate your PDMS microfluidic device. Thanks to its vacuum feedback loop, it can automatically regulate the vacuum inside the chamber without the need for manual tuning.

Major strengths:

  • Automatic pressure regulation for easy PDMS bonding.
  • Low-pressure drift gauge for reproducible process over time.
  • Secured vacuum pump to avoid contamination of the plasma chamber.
  • Three RF power available.
  • Numeric vacuum gauge.
  • Fine vacuum tuning compatible with 3 to 6 inches wafer.

Discover the EQUINOX-PLASMA CLEANER

Oven

oven photo lithography PDMS chip

Natural convention drying oven. Frontal panel with bimetallic fluid expansion probe thermo-regulator. It fits 4 inches wafer and allows you to cure your PDMS efficiently. Also, its size is adapted for a Petri dish size to heat two molds at one time. Its minimum footprint enables fast pre-heating and small electric consumption. It is a very movable device so it can be installed anywhere.

Major strengths:

  • Easy to use.
  • Internal chamber in aluminum for better heat diffusion.
  • Adjustable flow air going inside the chamber for venting.
  • Small footprint adapted to 15mm Petri dish.
  • Two internal shelves.
  • Light warning during heating.
  • Timer goes from 1 to 120 minutes.

Spin coater

SPIN caoter BLACK

A compact spin coater with advanced features, fitting wafers with up to 150mm diameter and 5″ x 5″ (127mm x 127mm) substrate. This spin coater is perfectly fine-tuned for controllable and repeatable PDMS layers. Its compact size with a panel control makes the device really movable and easy to use while the lid hole enables dynamic PDMS coating.

Major strengths:

  • Designed specifically for ease-of-use.
  • Simple to program from the operator panel or your PC.
  • Ability to set complex sequences with several accelerations and speeds.
  • Easy to clean.
  • Non-clogging system for extended lifetime.
  • Low vibration.
  • Speed up to 12000rpm.
  • Provided with wafer centering tool.

An adaptive offer!

Since each laboratory is different, since each research is unique, we do adapt the offer to be as close as possible of the real need. We discuss together what will be the best efficient facility and thus add or remove equipment, accessories, chemicals.

Do not hesitate to ask one of our technico-commercials to make an assessment of your facility and to advice you on your project.

Options

We have created basic offers with everything needed to have a complete working set, but some options can be added according to each situation. We have selected some options commonly used during softlithography processes but do not hesitate to ask our engineer if you have special expectations.

Air compressor Vacuum pump Ultrasonic bath
air compressor Jun air dedicated to microfluidics Elveflow

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LabTech vacuum pump VP18 plus Elveflow microfluidics

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Ultrasonic bath soft lithography

 

 

Need help or technical information?
Talk to an expert

Need help or advice?

For any help to determine what microfluidic instruments you need, you can contact us!
Our experts will help you build the best microfluidic setup for your application, with our state-of-the-art microfluidic line.

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